We are pleased to announce the installation of our production-grade Evatech Sputtering System CLN200E sputtering system in the Koohi Research Group. This state-of-the-art deposition platform expands our thin-film fabrication capabilities for advanced MEMS and microelectronic device development.
The Evatec CLN200E system provides high-uniformity film deposition for III-Nitride, enabling research into next-generation ferroelectric, piezoelectric, and tunable RF devices. The system’s advanced automation and precision process control support both research-scale and pre-production thin-film engineering.
Key System Features
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8-inch substrate capability with heated chuck up to 500 °C.
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Multi-gas compatibility: Ar, N₂, and O₂.
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Dual target shutters and substrate shutter for flexible co-sputtering configurations.
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Single-wafer load lock with automated wafer handling and manipulation.
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Fully automated operation with graphical user interface, process editor, and recipe management system.
This new tool will play a central role in exploring ferroelectric materials and supporting projects aimed at developing high-performance MEMS resonators, acoustic filters, and tunable RF front-end components.
Pleased to announce that Ryan Ozelton has received the competitive Samsung Austin Semiconductor Graduate Fellowship for Fall 2025. This prestigious fellowship supports Ryan’s ongoing work in semiconductor research within our group and includes engagement with Samsung experts and mentoring undergraduate researchers. Well done, Ryan! Let’s keep pushing boundaries.