Our Facilities

KRG combines in-house fabrication and measurement capabilities with Texas A&M’s shared nanofabrication and characterization facilities.

KRG in-house capabilities

Dedicated ferroelectric thin-film deposition: Evatec CLN200E

Production-grade sputtering platform for III-nitride and ferroelectric films: 8-inch substrates, heated chuck to 500 °C, Ar/N₂/O₂ process gases, dual target shutters for co-sputtering, automated single-wafer load lock, and full recipe management.

Evatec CLUSTERLINE 200 sputter system: operator station and wafer load port — Evatec CLUSTERLINE 200: operator station and load port.

Wafer handling module and process control station of the Evatec CLUSTERLINE 200 — Wafer handling module and process control station.

Intelligent Electromagnetic Sensor Laboratories (iEMSL)

KRG’s home base for RF, microwave, and mmWave measurement, operated within the Department of Electrical & Computer Engineering. KRG students are trained and run their own characterization on these benches: devices, circuits, and systems, from kHz to THz.

RF and microwave measurement laboratory — Measurement laboratory.

Shared Texas A&M facilities

AggieFab Nanofabrication Facility

Over 6,500 sq. ft. of class 100/1000 cleanroom space with advanced tools for micro- and nanoscale fabrication. KRG uses AggieFab for advanced material development and precise fabrication of devices, circuits, and systems.

Materials Characterization Facility (MCF)

High-end instrumentation for fundamental studies of surface and interfacial properties: ion- and electron-based spectroscopies, and electron, optical, and scanning probe microscopies. KRG uses MCF for comprehensive analysis of the novel material systems and devices we develop.

Collaborators and sponsors: to discuss access, capabilities, or joint work, see Funding & Partners, or email koohi@tamu.edu.