KRG combines in-house fabrication and measurement capabilities with Texas A&M’s shared nanofabrication and characterization facilities.
KRG in-house capabilities
Dedicated ferroelectric thin-film deposition: Evatec CLN200E
Production-grade sputtering platform for III-nitride and ferroelectric films: 8-inch substrates, heated chuck to 500 °C, Ar/N₂/O₂ process gases, dual target shutters for co-sputtering, automated single-wafer load lock, and full recipe management.
RF & microwave measurement (iEMSL)
Precision characterization of the devices, circuits, and systems developed in the group: RF, microwave, and semiconductor testing resources supporting our communication, sensing, and device research.
Shared Texas A&M facilities
AggieFab Nanofabrication Facility
Over 6,500 sq. ft. of class 100/1000 cleanroom space with advanced tools for micro- and nanoscale fabrication. KRG uses AggieFab for advanced material development and precise fabrication of devices, circuits, and systems.
Materials Characterization Facility (MCF)
High-end instrumentation for fundamental studies of surface and interfacial properties: ion- and electron-based spectroscopies, and electron, optical, and scanning probe microscopies. KRG uses MCF for comprehensive analysis of the novel material systems and devices we develop.
Collaborators and sponsors: to discuss access, capabilities, or joint work, email koohi@tamu.edu.